Wafer
Recycle Wafer
Use
Recycled used test wafer which is contaminate. When wafer receive from customer, it will inspect under same procedure as new wafer. If the wafer cannot recycle, trade in is available.
Features
200mm
| 200MM | ||||
| SPEC | 0.2 μm ≤ 30ea | 0.2 μm ≤ 30ea | 0.2 μm ≤ 30ea | 0.2 μm ≤ 30ea |
| Diameter (mm) | 200 ± 0.2 mm | 200 ± 0.2 mm | 200 ± 0.2 mm | 200 ± 0.2 mm |
| Type | P | P | P | P |
| Crystal orientation | <100> ± 1 | <100> ± 1 | <100> ± 1 | <100> ± 1 |
| Notch orientation | <110> ± 1 | <110> ± 1 | <110> ± 1 | <110> ± 1 |
| Resistance value (Ω ・ cm) | 1-100 | 1-100 | 1-100 | 1-100 |
| Thickness (μm) | 725 ± 25 | 725 ± 25 | 725 ± 25 | ≧ 650 |
| TTV (μm) | ≤25 | ≤2 | ≤25 | ≤25 |
| BOW (μm) | ≤40 | ≤40 | ≤40 | ≤40 |
| WARP (μm) | ≤40 | ≤40 | ≤40 | ≤40 |
| LM | NONE | NONE | Front / Back | N / A |
| Surface impurities | ≤ 5.0E 10 atom / cm2 | ≤ 5.0E 10 atom / cm2 | ≤ 5.0E 10 atom / cm2 | ≤ 5.0E 10 atom / cm2 |
300mm
| 300MM | |||||
| SPEC | 0.065um ≤ 30ea | 0.09um ≤ 30ea | 0.12um ≤ 30ea | 0.20um ≤ 30ea | 0.20um ≤ 50ea |
| Manufacturing method | CZ | CZ | CZ | CZ | CZ |
| Diameter (mm) | 300 ± 0.2 mm | 300 ± 0.2 mm | 300 ± 0.2 mm | 300 ± 0.2 mm | 300 ± 0.2 mm |
| Type / Dopant | P / Boron | P / Boron | P / Boron | P / Boron | P / Boron |
| Crystal orientation | <100> ± 1 | <100> ± 1 | <100> ± 1 | <100> ± 1 | <100> ± 1 |
| Notch orientation | <110> ± 1 | <110> ± 1 | <110> ± 1 | <110> ± 1 | <110> ± 1 |
| Resistance value (Ω ・ cm) | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 |
| Thickness (μm) | 775 ± 25 | 775 ± 25 | 775 ± 25 | 775 ± 25 | 725 ± 25 |
| TTV (μm) | ≤10 | ≤10 | ≤10 | ≤10 | ≤25 |
| BOW (μm) | ≤40 | ≤40 | ≤40 | ≤40 | ≤50 |
| WARP (μm) | ≤40 | ≤40 | ≤40 | ≤40 | ≤50 |
| LM | T7 + OCR | T7 + OCR | T7 + OCR | T7 + OCR | T7 + OCR |
| Surface impurities | <1 E10 Atoms / cm2 | <1 E10 Atoms / cm2 | <1 E10 Atoms / cm2 | <1 E10 Atoms / cm2 | <1 E10 Atoms / cm2 |
Please contact us for direction and resistivity measurements.