What we do

We adhere to the consistent zealous attitude and provide the most superior service to all customers.

We specialised in trade business which involves a wide range of plastic raw materials (resin), electronic materials, semiconductors, chloroprene rubber, special element additives, injection machines, paints and etc.

Wafer

Test Wafer

Use

Evaluation wafer use for inspections and experiments in the pre-process of semiconductor equipment

Features

150mm

	SEMI	JEIDA
SPEC	0.2um ≤ 30ea	0.2um ≤ 30ea
Diameter (mm)	150 ± 0.2 mm	150 ± 0.2 mm
Type	P	P
Orifura length	57.5mm ± 2.5mm	47.5mm ± 2.5mm
Resistance value (Ω ・ cm)	1-100	1-100
Thickness (μm)	675um ± 25um	675um ± 25um
TTV (μm)	≤ 30um	≤ 30um
BOW (μm)	≤ 40um	≤ 40um
WARP (μm)	≤ 40um	≤ 40um
Surface impurities	≤ 5.0E 10 atom / cm2	≤ 5.0E 10 atom / cm2

200mm

SPEC	0.2um ≤ 30ea	– –
Diameter (mm)	200 ± 0.2 mm	200 ± 0.2 mm
Type	P	P
Crystal orientation	<110> ± 1	<110> ± 1
Notch orientation	<110> ± 1	<110> ± 1
Resistance value (Ω ・ cm)	1-100	1-100
Thickness (μm)	725 ± 25	725 ± 25
TTV (μm)	≤25	≤2
BOW (μm)	≤ 40um	≤ 40um
WARP (μm)	≤ 40um	≤ 40um
LM	none	none
Surface impurities	≤ 5.0E 10 atom / cm2	≤ 5.0E 10 atom / cm

300mm

SPEC	0.045um ≤ 50ea	0.065um ≤ 50ea	0.09um ≤ 50ea	0.12um ≤ 50ea
Manufacturing method	CZ	CZ	CZ	CZ
Diameter (mm)	300 ± 0.2 mm	300 ± 0.2 mm	300 ± 0.2 mm	300 ± 0.2 mm
Type / Dopant	P / Boron	P / Boron	P / Boron	P / Boron
Crystal orientation	<100> ± 1	<100> ± 1	<100> ± 1	<100> ± 1
Notch orientation	<110> ± 1	<110> ± 1	<110> ± 1	<110> ± 1
Resistance value (Ω ・ cm)	1-100	1-100	1-100	1-100
Thickness (μm)	775 ± 25	775 ± 25	775 ± 25	775 ± 25
TTV (µm)	≤10	≤10	≤10	≤10
BOW (μm)	≤40	≤40	≤40	≤40
WARP (μm)	≤40	≤40	≤40	≤40
LM	T7 + OCR	T7 + OCR	T7 + OCR	T7 + OCR
Surface impurities	<1 E10 Atoms / cm2	<1 E10 Atoms / cm2	<1 E10 Atoms / cm2	<1 E10 Atoms / cm2