Electron Microscope Emitter
Denka TFE
Use
High Resolution Scanning Electron Microscopy, Transmission Analytical Electron Microscopy, Semiconductor Test Setup (CD-SEM, DR-SEM EBI), Electron Beam Exposure
Features
Respond to a wide tip radius range.
High reproducibility of emission.
Built-in service to guns is available.
Integrated with the chip, suppressor and extraction electrodes to be supplied in a module form.
